Pneumatic EV Manifold Retrofit Kits

Valin has engineered drop-in pneumatic EV manifold replacements that are a perfect solution for your aging fleet of semi tools. Semiconductor fabricators can now reduce wafer scrap, eliminate air leaks and improve wafer yield with these new pneumatic EV manifold replacements. We're so confident that this manifold will improve your wafer yield that we will send you a product to evaluate at no charge for 60 days.

Click here to request POE (Product on Evaluation) order. Stock is available and ready to ship!
 
Endura SVD Slit Valve Pneumatic Manifold Replacement for 0010-20052 & 0010-70297

Endura SVD (Slit Valve Door) Pneumatic EV Manifold Replacement for 0010-20052 & 0010-70297

The AC-150-2321 pneumatic EV manifold comes as a complete kit for ease of installation. Current Endura pneumatic EV manifolds 0010-20052 & 0010-70297 are up to 25 years old with potential Cv leakage and are obsolete. Valin’s drop in pneumatic EV manifold replacement is a complete solution!  Learn more about Valin's Endura SVD (Slit Valve Door) Pneumatic EV Manifold Replacement.

 

Endura TxZ Remote Gas Box Pneumatic Manifold Replacement

Endura TxZ Remote Gas Box Pneumatic EV Manifold Replacement for 0190-43610

Valin has engineered a drop-in pneumatic EV manifold replacement that is a perfect solution for your obsolete TxZ remote gas box pneumatic EV manifold on your aging fleet of Endura 0190-43610 process tools. The AC-150-2473 pneumatic EV manifold comes as a complete kit for ease of installation. Learn more about Valin's Endura TxZ Remote Gas Box Pneumatic EV Replacement.

Centura Gas Box Pneumatic Manifold Replacement for 0190-09487 & 0190-02046

Centura and Centura Ultima Gas Box Pneumatic EV Manifold Replacement for 0190-09487, 0190-02046, & 0190-01625

The AC-150-2444 pneumatic EV manifold comes as a complete kit for ease of installation. The AC-150-2444 replaces Centura pneumatic EV manifold part 0190-09487, 0190-02046 and 0190-01625 for both the lower gas box (Manifold 1) and upper gas box (Manifold 2). If an NF3 interlock is required, the AC-150-2466 NF3 Adaptor Kit can be added to the AC-150-2444 manifold kit. Learn more about Valin's Centura Gas Box Pneumatic EV Manifold Replacement.

Centura and Centura Ultima Chamber Pneumatic EV
Manifold  Replacement for 0190-20124, 0190-20148, & 0010-01801

centura chamber pneumatic manifold 0190-20124 0190-20148 AC-150-2463
The AC-150-2463 Centura Chamber and the AC-150-2459 Centura Ultima Chamber pneumatic EV manifolds come as a complete kit for ease of installation. These are 14 Station, 14 Valve Manifolds and replace the existing pneumatic EV manifolds. Each kit includes a pneumatic EV manifold with SVD LOTO On/Off control valve, mounting plate, PCB and cable. As a complete drop-in solution these are pneumatically, electrically, physically compatible with the Centura and Ultima chamber assemblies. Both improve reliability and the larger valve Cv results in faster response times. Learn more about Valin's Centura and Centura Ultima Chamber Pneumatic EV Manifold Replacement.

Video: Valin’s Pneumatic EV Manifold Retrofit Solutions

Case Study: Semifab Reduces Wafer Scrap with Pneumatic EV Manifold Retrofit Kits

Case Study: Semi Fab Eliminates Air Leaks with Easy to Install Manifold Retrofit Kits

Article: Improving Yield through Upgraded Pneumatic EV Manifolds

Press Release: Valin Corporation Customers See Success with Pneumatic EV Manifold Retrofit Kits

Blog: Wafer Yield in the Semiconductor Industry

Download Pneumatic Manifold Retrofit Kits Flyer

Have questions?

Contact our team of semiconductor technical specialists at (855) 737-4716 or email our team at manifold@valin.com to learn more.
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The NIST Chemistry WebBook contains a great deal of information regarding the properties of a broad range of chemicals and is helpful for those who deal with chemical processes.In this article, Jon Monsen has outlined the procedure for finding the actual density of a gas using the WebBook.