Parker Fluoroflow Select Filter Cartridge

Parker Fluoroflow Select Filter Cartridge
The Fluoroflow Select pleated membrane filter cartridge provides exceptional flow rates and on-stream life. It utilizes our unique SELECT pleat technology which increases filtration area and flow rate by over 70% versus our standard Fluoroflow. This results in increased bath turnover and longer filter life demanded by today's fabs. The all-fluoropolymer construction provides excellent chemical resistance for the most aggressive applications up to 180°C.

Available wet-packed for quick installation or Ultraclean wet packed which offers the lowest metals extractables in the industry.

Benefits:
  • Exceptional flow rates increase bath turnover rates
  • High chemical and thermal resistance
  • 100% integrity tested
  • Operating temperature 150oC (up to 180oC with HT option)
  • Wet-packed option available for fast installation
  • Higher membrane area for increased filter life

Applications:
  • Processes using aggressive chemicals and process fluids
  • High temperature recirculation baths operating at elevated temperatures
  • Hot phosphoric acid in nitride etching process

Specifications:
  • Materials of construction - 100% Fluoropolymer construction (All components are thermally bonded to ensure integrity and reduce extractables)
  • Effective filtration area - 6.0ft² (0.56 m²) 4” (100mm) cartridge, 12.2ft² (1.1 m²) 10” (250mm) cartridge
  • Metals extractables - <20ppb (total) in a 10% HNO3 extraction of 1.5 liters for 24 hours at ambient temperature
  • Cleanliness (particle shedding) - Wet-packed <2 particles/ml >0.2μm after 7gal at 1gal/min, Dry-packed <2 particles/ml >0.2μm after 12gal at 1gal/min
  • TOC/resistivity rinse-up (wet-packed) - TOC recovery within 3-5ppb of feed without additional
  • rinse-up, Resistivity recovery within 0.4megohm-cm of feed after 22gal @ 1gpm

Download the Parker Fluoroflow Select Filter Cartridge Datasheet


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